"High-performance silicon capacitive pressure sensor" passed the acceptance recently

The Shenyang High-tech Industrial Development Plan project “High-performance Silicon Capacitive Pressure Sensor” undertaken by Shenyang Instrumentation Institute affiliated to SINOMACH recently passed the acceptance.

The project uses advanced microelectronics and micro-mechanical processing technology, which is innovative in silicon capacitor sensor design, manufacturing process technology, sensor packaging structure, etc. A new high-performance silicon capacitor differential pressure sensor product with independent intellectual property rights. The product accuracy is better than 0.075% FS. The technical level has reached domestic leading and international first-class.

The project has built a silicon capacitor differential pressure sensor production line with an annual production capacity of 10,000 units, realized the serial production of products, and for the first time realized the localization of the core sensors of smart transmitter products, breaking the foreign technical blockade and filling the domestic blank. At the same time, as an upstream core device, this research has driven the development of the sensor, transmitter and related instrument industries, solved the problem of coreless watches, and effectively supported the construction of the high-end equipment manufacturing industry chain.

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